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A2 Digital Mass Flow Controller

  • Commodity name: A2 Digital Mass Flow Controller
  • Product Description
  • Features:

    • The full-scale flow range covers 2 sccm to 50 slm (N2 EqV.).
    • Rubber seals, metal seals, and all-metal seals are available, catering to different application requirements.
    • Unique sensor design offering extremely high precision, stability, and response speed.
    • The smooth flow channel design ensures smoother airflow passage.
    • It simultaneously supports both the RS-485 and Modbus RTU communication protocols.
    • Optional EtherCAT communication protocol.
    • Optional multi-function LCD digital display screen.
    • Optional multi-gas and multi-range functionality.
    • Dimensions (1/4” VCR): 131mm x 124mm x 28mm
    ModelA2 Simulation
    Full-scale flow rate (N2 conversion)2SCCM-50 SLM
    Valve typeNormally Closed/Normally Open Solenoid Valve
    Sealed

    Rubber seal

    Metal seal 
    All-metal sealing

    Response time≤0.8 seconds
    Accuracy≤1% of the setpoint + 6 (25% - 100%6) 
    ≤ +0.25% of full scale (0~25%6)
    Linear≤0.5% of full scale (>30 SLM: <1%)
    Repetitiveness≤0.1% of full scale
    Operating pressure (pressure difference)0.05 - 0.28 MPa (2 SCCM - 5 SLM) 
    0.1–0.28 MPa (6 SLM–50 SLM)
    Leakage rate

    Rubber seal: Max 1×10⁻⁹ Pa·m³/s (He)

    Metal/All-metal: Max 1 × 10⁻¹ lPa·m³/sec (He)

    Control range2-100% of full scale (MGMR: 5-100%)
    Maximum operating pressure0.48 MPa
    Withstand voltage1 MPa
    Installation directionArbitrary
    Communication methodSimulation: DC 0-5V / 4-20mA
    Power Supply Type+15VDC/+12VDC to +32VDC
    Temperature5-45°C
    Materials

    Rubber: SUS316L, Viton, PTFE, electromagnetic stainless steel

    Metal: SUS316L, Ni, PTFE, electromagnetic stainless steel

    All-metal: SUS316L, Ni, electromagnetic stainless steel

    WeightApproximately 0.8 kg

     

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